Solutions for Film Thickness measurement

Measurement of thin film thickness is performed by Spectroscopic Ellipsometry. This technique is able to measure films down to a few Angstroms. For thick films, depth profiling is sometimes more adapted. This can be performed using Elemental solutions like Glow Discharge Emission Spectroscopy (GDOES) or molecular measurement techniques like Raman Spectroscopy.

Techniques for Measurement of Film Thickness

HORIBA offers several types of Spectroscopic Ellipsometers for research or production environments.


Call: or ► E-mail us ◄
USA: +1 (732) 494-8660
Divisions
France: Divisions
Germany: +49 (0) 6251 / 84 75-0
Italy: +39 0 2 57603050
Japan: +81 (0) 3 38618231
China: +86 (0) 21 6289 6060
Russia: +7 495 221-87-71 / 72 or 73
U.K.: +44 (0) 20 8204 8142